2016407

9781580535366

Mems Mechanical Sensors

Mems Mechanical Sensors
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  • ISBN-13: 9781580535366
  • ISBN: 1580535364
  • Publication Date: 2004
  • Publisher: Artech House, Incorporated

AUTHOR

Beeby, Stephen

SUMMARY

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.Beeby, Stephen is the author of 'Mems Mechanical Sensors', published 2004 under ISBN 9781580535366 and ISBN 1580535364.

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